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35 results

Conference Proceedings

1. High-resolution proximity printing by wave-optically designed complex transmission masks

Buhling,S. ; Wyrowski,F. ; Kley,E.-B. ; Nellissen,A.J.M. ; Wang,L. ; Dirkzwager,M.

Pub. info.:	Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK. pp.221-230, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4404

Conference Proceedings

2. Fascination and challenge of subwavelength-structured interfaces

Wyrowski,F. ; Kley,E.-B. ; Schnabel,B. ; Turunen,J.P. ; Honkanen,M.

Pub. info.:	Optical memory and neural networks : optical information science & technology '97 : 27-30 August 1997, Moscow, Russia. pp.32-38, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3402

Conference Proceedings

3. Adapting existing e-beam writers to write HEBS-glass gray-scale masks

Kley,E.-B. ; Cumme,M. ; Wittig,L.-C. ; Wu,C.

Pub. info.:	Diffractive and holographic technologies, systems, and spatical light modulators VI : 27-29 January 1999, San Jose, California. pp.35-45, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3633

Conference Proceedings

4. Diffractive optical elements with polarization multiplexing

Zeitner,U.D. ; Schnabel,B. ; Kley,E.-B. ; Wyrowski,F.

Pub. info.:	Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG. Part 1 pp.189-194, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3099

Conference Proceedings

5. Integration of high-power laser diodes with micro-optical components in a compact pumping source for visible fiber laser

Coering,R. ; Hoefer,B. ; Kraeplin,A. ; Schreiber,P. ; Kley,E.-B. ; SchmeiBer,V.

Pub. info.:	Optoelectronic integrated circuits and packaging III : 28-29 January 1999, San Jose, California. pp.191-197, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3631

Conference Proceedings

6. E-beam lithography:an efficient tool for the fabrication of diffractive and micro-optical elements

Kley,E.-B. ; Schnabel,B. ; Zeitner,U.D.

Pub. info.:	Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.222-232, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3008

Conference Proceedings

7. Fabrication and application of subwavelength gratings

Schnabel,B. ; Kley,E.-B.

Pub. info.:	Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.233-241, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3008

Conference Proceedings

8. Proximity printing by wave-optically designed masks

Wyrowski,F. ; Kley,E.-B. ; Buhling,S. ; Nellissen,A.J.M. ; Wang,L. ; Dirkzwager,M.

Pub. info.:	Wave-optical systems engineering : 30-31 July 2001 San Diego, USA. pp.130-139, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4436

Conference Proceedings

9. Fabrication of microlens arrays in CaF2 by ion milling

Flamm,D. ; Schindler,A. ; Harzendorf,T. ; Kley,E.-B.

Pub. info.:	Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA. pp.108-116, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4179

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Conference Proceedings

10. Fabrication technologies for micro-optical elements with arbitrary surfaces

Schilling,A. ; Nussbaum,Ph. ; Philipoussis,I. ; Herzig,H.P. ; Stauffer,L. ; Rossi,M. ; Kley,E.-B.

Pub. info.:	Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA. pp.65-72, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4179

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Author: Kley,E.-B.