1.

Conference Proceedings
Conference Proceedings
1. High-repetition-rate excimer lasers for DUV Lithography
Stamm,U. ; Paetzel,R. ; Bragin,I. ; Berger,V. ; Klaft,I. ; Kleinschmidt,J. ; Osmanov,R. ; Schroeder,T. ; Vogler,K. ; Zschocke,W. ; Basting,D.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.1050-1057,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Long-term test and characterization of optical components at 193 nm and 157 nm
Vogler,K. ; Klaft,I. ; Schroder,T. ; Stamm,U. ; Mann,K.R. ; Apel,O. ; Gorling,C. ; Leinhos,U.
Pub. info.: Inorganic optical materials II : 1-3 August, 2000, San Diego, USA.  pp.255-260,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4102
3.

Conference Proceedings
Conference Proceedings
3. Advanced F2 lasers for 157-nm lithography
Vogler,K. ; Klaft,I. ; Voss,F. ; Bragin,I. ; Bergmann,E. ; Nagy,T. ; Niemoeller,N. ; Paetzel,R. ; Govorkov,S.V. ; Hua,G.
Pub. info.: Optical Microlithography XIV.  4346  pp.1175-1182,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346