1.

Conference Proceedings
Conference Proceedings
1. Measurement of the dielectric function spectra of low dielectric constant using the spectroscopic ellipsometry
Horie, M. ; Postava, K. ; Yamaguchi, T. ; Akashika, K. ; Hayashi, H. ; Kitamura, F.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.803-809,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. Novel inspection technology for half pitch 55 nm and below
Kinoshita, A. ; Kitamura, F. ; Horie, M. ; Yoshida, T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.174-182,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752