Sobajima, Y. ; Sugano, T. ; Kitagawa, T. ; Toyama, T. ; Okamoto, H.
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Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.111-116, 2005. Warrendale, Pa.. Materials Research Society
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.225-233, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Nohama, S. ; Omori, S. ; Iwase, K. ; Watanabe, Y. ; Amai, K. ; Sasaki, T. ; Moriya, S. ; Kitagawa, T.
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Photomask and Next-Generation Lithography Mask Technology X. pp.970-978, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Omori, S. ; Iwase, K. ; Watanabe, Y. ; Amai, K. ; Sasaki, T. ; Nohama, S. ; Ashida, I. ; Moriya, S. ; Kitagawa, T.
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Photomask and Next-Generation Lithography Mask Technology X. pp.958-969, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Nohdo, S. ; Motohashi, T. ; Shimazu, N. ; Nakano, H. ; Omori, S. ; Kitagawa, T. ; Moriya, S.
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Photomask and Next-Generation Lithography Mask Technology X. pp.871-878, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering