1.

Conference Proceedings
Conference Proceedings
1. Lattice Strain and Defects in Epitaxial Silicon Wafers*
Kirscht,F. ; Snegirev,B. ; Zaumseil,P. ; Kissinger,G. ; Takashima,K. ; Wildes,P. ; Hennessy,J.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.60-67,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3322
2.

Conference Proceedings
Conference Proceedings
2. Light Scattering Tomography for Characterization of Semiconductors*
Ogawa,T. ; Kissinger,G. ; Nango,N.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.132-146,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3322
3.

Conference Proceedings
Conference Proceedings
3. Defects in as-grown silicon and their evolution during beat treatments
Vanhellemont,J. ; Doruberger,E. ; Esfandyari,J. ; Kissinger,G. ; Trauwaert,M.-A. ; Bender,H. ; Graf,D. ; Lambert,U. ; Ammon,W.von
Pub. info.: Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997.  Part1  pp.341-346,  1997.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 258-263
4.

Conference Proceedings
Conference Proceedings
4. Point Defects in SiGe Epitaxial Layers and Bulk Crystals
Erzgraber,H.B. ; Kissinger,G. ; Krtiger,D. ; Morgenstern,T. ; Schmalz,K. ; Schilz,J. ; Kurten,M. ; Osinsky,A.
Pub. info.: Proceedings of the 17th International Conference on Defects in Semiconductors : ICDS-17, Gmunden, Austria, July 18-23, 1993.  Pt.1  pp.489-494,  1994.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 143-147
5.

Conference Proceedings
Conference Proceedings
5. Lattice Defects in High Quality As-Grown CZ Silicon,Studied with Light Scattering and Preferential Etching Techniques
Vanhellemont,J. ; Kissinger,G. ; Graf,D. ; Kenis,K. ; Depas,M. ; Mertens,P. ; Lambert,U. ; Heyns,M. ; Claeys,C. ; Richter,H. ; Wagner,P.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1755-1760,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
6.

Conference Proceedings
Conference Proceedings
6. Diffusion-induced dislocations in highly boron-doped silicon layers used for bulk micromachining applications
Gaiseanu,F. ; Esteve,J. ; Kissinger,G. ; Kruger,D.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.88-96,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511