Kim. J. ; Gila, B.P. ; Mehandru, R. ; Johnson, J.W. ; Shin, J.H. ; Lee, K.P. ; Luo. B. ; Oristine, A. ; Abernathy, C.R. ; Prarton, S.J. ; Ren, F.
Pub. info.:
State-of-the-art program on compound semiconductors XXXVI and wide bandgap semiconductors for photonic and electronic devices and sensors II : proceedings of the international symposia. pp.184-190, 2002. Pennington, N.J.. Electrochemical Society
Koo, S. ; Ban, K. ; Lim. C. ; Bok, C. ; Moon, S. C. ; Kim. J.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.61522T-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering