1.

Conference Proceedings
Conference Proceedings
1. Production of SCALPEL masks in a commercial mask facility
Newport,C.L. ; Parker,J. ; Smith,K.M. ; Benveniste,A. ; Kim,N.-W. ; Reyland,D. ; Farrow,R.C. ; Novembre,A.E. ; Kasica,R.J. ; Knurek,C.S. ; Peabody,M.L. ; Rutberg,L.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.162-170,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings
Conference Proceedings
2. 130-nm node mask development
Chabala,J.M. ; Weaver,S. ; Alexander,D. ; Lu,M. ; Kim,N.-W. ; Cole,D.M.
Pub. info.: 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.42-50,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4349