1.

Conference Proceedings
Conference Proceedings
1. Design and synthesis of new photoresist materials for ArF lithography
Choi,S.-J. ; Kim,H.-W. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part1  pp.54-61,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
2.

Conference Proceedings
Conference Proceedings
2. Novel polymers for 193-nm single-layer resist based on cycloolefin polymers
Kim,H.-W. ; Lee,S.-H. ; Kwon,K.-Y. ; Jung,D.-W. ; Lee,S. ; Yoon,K.-S. ; Choi,S.-J. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.1100-1107,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
3.

Conference Proceedings
Conference Proceedings
3. Robust and fast OPC approach for metal interconnects of 0.13um logic devices
Park,J.-S. ; Kim,D.-H. ; Park,C.-H. ; Kim,Y.-H. ; Yoo,M.-H. ; Kong,J.-T. ; Kim,H.-W. ; Yoo,S.-I.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1104-1111,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
4.

Conference Proceedings
Conference Proceedings
4. Design and performance of photoresist materials for ArF lithography
Kim,H.-W. ; Jung,D.-W. ; Lee,S. ; Choi,S.-J. ; Woo,S.-G. ; Kavanagh,R.J. ; Barclay,G.G. ; Blacksmith,R.F. ; Kang,D. ; Pohlers,G. ; Cameron,J.F. ; Mattia,J. ; Caporale,S. ; Penniman,T. ; Joesten,L.A. ; Thackeray,J.W.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.776-783,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345