Mazurowski, J. ; Baral-Tosh, S. ; Ramseyer, G. ; Spencer, J. T. ; Kim, Yoon-Gi ; Dowben, P. A.
Pub. info.:
Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.. pp.101-106, 1991. Pittsburgh, Pa.. Materials Research Society
Kim, Yoon-Gi ; Bialy, S. ; Miller, R.W. ; Spencer, J.T. ; Dowben, P.A. ; Datta, Saswati
Pub. info.:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.103-108, 1990. Pittsburgh, Pa.. Materials Research Society
Zhang, Zhongju ; Kim, Yoon-Gi ; Dowben,P.A. ; Spencer, James T.
Pub. info.:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.407-412, 1989. Pittsburgh, Pa.. Materials Research Society
Glass, Jr., John A. ; Kher, Shreyas ; Kim, Yoon-Gi ; Dowben, P.A. ; Spencer, James T.
Pub. info.:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.439-444, 1991. Pittsburgh, Pa.. Materials Research Society