1.

Conference Proceedings
Conference Proceedings
1. Development of an RTA Process for the Enhanced Crystallization of Amorphous Silicon Thin Films
Yoon, Y.-G. ; Kim, T.-K. ; Kim, K.-B. ; .Choi, J.-Y ; Lee, B.-I ; Joo, S.-K.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.337-344,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
2.

Conference Proceedings
Conference Proceedings
2. Simulation technique for the PR flow process using a new viscous flow model
Chung, W.-Y. ; Kim, T.-K. ; Yoon, J.-Y. ; Kim, H.-W. ; Park, Y.-K. ; Kong, J.-T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.975-982,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376