Kim, S.-S. ; Chalyck, R. ; Woo, S.-G. ; Cho, H.-K.
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Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.64-77, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Park, E.S. ; Lee, J.H, ; Park, D.I. ; Jeong, W.-G. ; Seo, S.K. ; Kim, S.-S. ; Choi, S.-S. ; Jeong, S.-H.
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22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.792-799, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering