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19 results

Conference Proceedings

1. NUCLEATION PHENOMENA DURING TITANIUM SILICON REACTION

Raaijmakers,. Ivo J. M. M. ; van Ijzendoorn, Leo J., ; Theunissen, Anton M. L. ; Kim, Ki-Bum

Pub. info.:	Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.267-272, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	146

Conference Proceedings

2. RAPID THERMAL CHEMICAL VAPOR DEPOSITION OF POLYCRYSTALLINE SILICON FROM DICHLOROSILANE

Kermani, Ahmad ; Johnsgard, Kristian E. ; Suthar, Sailish ; Kim, Ki-Bum ; Lam, Shung

Pub. info.:	Polysilicon thin films and interfaces. pp.21-28, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	182

Conference Proceedings

3. IN-SITU DOPED POLYCRYSTALLINE SILICON DEPOSITED BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION USING TERTIARYBUTYLPHOSPHINE

Liao, Jimmy C. ; Kim, Ki-Bum ; Maillot, Philippe

Pub. info.:	Polysilicon thin films and interfaces. pp.15-20, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	182

Conference Proceedings

4. IN-SITU ANNEALING TRANSMISSION ELECTRON MICROSCOPY (TEM) STUDY OF THE Ti/GaAs INTERFACIAL REACTIONS

Kim, Ki-Bum ; Sinclair, Robert

Pub. info.:	Chemistry and defects in semiconductor heterostructures. pp.21-28, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	148

Conference Proceedings

5. Chemical Vapor Deposition of Tantalum Nitride Films Using Pentakis(diethylamido)tantalum and Ammonia

Cho, Sung-Lae ; Kim, Ki-Bum ; Min, Seok-Hong ; Shin, Hyun-Kook

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.531-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

6. A Comparative Study on the Titanium Nitride (TiN) as a Diffusion Barrier Between Al/Si and Cu/Si: Failure Mechanism and Effect of Stuffing

Park, Ki-Chul ; Kim, Ki-Bum

Pub. info.:	Materials reliability in microelectronics V : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.211-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	391

Conference Proceedings

7. Low Temperature Deposition of TaCN Films Using Pentakis(Diethylamido)Tantalum

Jun, Gyu-Chang ; Cho, Sung-Lae ; Kim, Ki-Bum ; Shin, Hyun-Koock ; Kim, Do-Heyoung

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.349-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

Conference Proceedings

8. Electron Emission From Gated Diamond Emitter Array

Ha, Seung-Chul ; Kang, Dae-Hwan ; Kim, Byung-Sung ; Min, Seok-Hong ; Kim, Ki-Bum

Pub. info.:	Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.77-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	509

Conference Proceedings

9. Effects of Germanium on Grain Size and Surface Roughness of the Solid-Phase Crystallized Polycrystalline Si1-xGex Films

Kim, Jin-Won ; Ryu, Myung-Kwan ; Kim, Tae-Hoon ; Kim, Ki-Bum ; Kim, Sang-Joo

Pub. info.:	Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.255-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	424

10.

Conference Proceedings

10. Solid-Phase Crystallization of Amorphous Si0.7Ge0.3/Si and Si/Si0.7Ge0.3 Bilayer Films on SiO2

Kim, Tae-Hoon ; Ryu, Myung-Kwan ; Kim, Jin-Won ; Kim, Chang-Soo ; Kim, Ki-Bum

Pub. info.:	Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.231-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	424

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Author: Kim, Ki-Bum