1.

Conference Proceedings
Conference Proceedings
1. Thin Nitride Barrier Self-Aligned Contact (TNBSAC) Oxide Etching in a High Density Inductively Coupled Plasma Using C4F8/CH3F/Ar Chemistry
Kim, J-H. ; Ryu, J-O. ; Kim, J-S. ; Lee, B-C. ; Kim, J-W. ; Seol, Y-S.
Pub. info.: Proceedings of the twelfth International Symposium on Plasma Processing.  pp.137-145,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-4
2.

Conference Proceedings
Conference Proceedings
2. Hydrogen Induced Polarization Degradation of SrBi2Ta2O9 Thin Film Capacitors in Plasma Etching
Kwon, O-S. ; Seal, Y-S. ; Kim, J-W. ; Hwang, J-M.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.173-182,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
3.

Conference Proceedings
Conference Proceedings
3. Low-Frequency Dielectric Properties of Sol-Gel Derived BaTiO3 Thin Films
Lee, S-J. ; Kang, K-Y. ; Kim, J-W. ; Han, S. K. ; Jeong, S-D.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.495-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541
4.

Technical Paper
Technical Paper
4. Friction and Wear Characteristics of TiN Coated Vane for the Rotary Compressor in a R410A Refrigerant.
Oh, S-D. ; Kim, J-W. ; Lee, Y-Z.
Pub. info.: A.S.M.E. paper.  2003.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : TRIB
Ser. no.: 2003
5.

Technical Paper
Technical Paper
5. A Cellular Motor Based Micro Pump- Integration of Cellular Motors with Micro Channels.
Pooran, R. ; Tung, S. ; Kim, J-W. ; Malshe, A. P.
Pub. info.: A.S.M.E. paper.  2003.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : IMECE
Ser. no.: 2003