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Conference Proceedings

1. Effect of Corrosion Inhibitor (BTA) in Citric Acid Based Slurry on Cu CMP

Kim, In-Kwon ; Kang, Young-Jae ; Hong, Yi-Koan ; Park, Jin-Goo

Pub. info.:	Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.3-8, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	867

Conference Proceedings

2. The Adsorption Behaviors of Citric Acid on Abrasive Particles in Cu CMP Slurry

Kang, Young-Jae ; Hong, Yi-Koan ; Song, Jae-Hoon ; Kim, In-Kwon ; Park, Jin-Goo

Pub. info.:	Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.153-158, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	867