1.

Conference Proceedings
Conference Proceedings
1. Physical and Chemical Characterization of Re-Used Oxide CMP Slurry
Kim, Hyung-Joon ; Fom, Dae-Hong ; Kim, Myoung-Shik ; Park, Jin-Goo
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.143-153,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-26
2.

Conference Proceedings
Conference Proceedings
2. Effect of Organic Acids in Slurry on Copper CMP
Eom, Dae-Hong ; Kim, Hyung-Joon ; Song, Hyung-Soo ; Park, Jin-Goo
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.201-211,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-26