1.

Conference Proceedings

Conference Proceedings
Bae, T.M. ; Jin, S.H. ; Choo, J.H. ; Park, M. ; Ro, Y.M. ; Kim, H.-R. ; Kang, K.
Pub. info.: Internet imaging V : 19-20 January 2004, San Jose, California, USA.  pp.214-223,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5304
2.

Conference Proceedings

Conference Proceedings
Kim, S.-K. ; Kim, J.-S. ; Yoo, T.-J. ; Kong, K.-K. ; Yun, H.-S. ; Kim, Y.-D. ; Kim, H.-R. ; Kim, Y.-S. ; Kim, H.S.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1321-1326,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings

Conference Proceedings
Park, S.-J. ; Kim, H.-R. ; Lee, Y.-S. ; Yang, W.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.878-882,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
4.

Conference Proceedings

Conference Proceedings
Kim, J.-S. ; Jung, J.-C. ; Kong, K.-K. ; Kim, H.-R. ; Kim, H.-S.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.761-769,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039