1.

Conference Proceedings
Conference Proceedings
1. METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF InSb ON GaAs AND InSb IN AN INVERTED STAGNATION POINT FLOW GEOMETRY
Hebner, G. A. ; Biefeld, R. M. ; Killeen, K. P.
Pub. info.: Advances in materials, processing, and devices in III-V compound semiconductors.  pp.73-78,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 144
2.

Conference Proceedings
Conference Proceedings
2. PHOTOLYTIC DEPOSITION OF InSb FILMS
Zuhoski, S. P. ; Killeen, K. P. ; Biefeld, R. M.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.313-318,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
3.

Conference Proceedings
Conference Proceedings
3. SPECTRAL REFLECTANCE AS AN IN SITU MONITOR FOR MOCVD
Breiland, W. G. ; Killeen, K. P.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.99-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
4.

Conference Proceedings
Conference Proceedings
4. Optical-based Flux Monitoring of Atomic Antimony Sources for Molecular Beam Epitaxy
Brewer, P. D. ; Killeen, K. P.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.109-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406
5.

Conference Proceedings
Conference Proceedings
5. Patterning of GaN in High-Density Cl2- and BCl3-Based Plasmas
Shul, R. J. ; Briggs, R. D. ; Han, J. ; Pearton, S. J. ; Lee, J. W. ; Vartuli, C. B. ; Killeen, K. P. ; Ludowise, M. J.
Pub. info.: Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.355-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 468