1.

Conference Proceedings
Conference Proceedings
1. Deposition of PZT thin films by pulsed laser ablation for MEMS application
Maeda,R. ; Kikuchi,K.M. ; Schroth,A. ; Umezawa,A. ; Masumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.372-379,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
2.

Conference Proceedings
Conference Proceedings
2. Preparation and characterization of sol-gel-derived PZT thin films for microactuators
Wang,Z. ; Maeda,R. ; Kikuchi,K.M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.948-955,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680