1.

Conference Proceedings
Conference Proceedings
1. FABRICATION OF HEMT-ON-Si BY MOVPE FOR LSI APPLICATIONS
Ohori, Tatsuya ; Kikkawa, T. ; Suzuki, M. ; Takasaki, K. ; Komeno, J.
Pub. info.: Advanced III-V compound semiconductor growth, processing and devices : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.505-510,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 240
2.

Conference Proceedings
Conference Proceedings
2. Improvement in Electromigration of AlSiCu Reflowed on Recessed w-Plug
Kakuhara, Y. ; Yamada, Y. ; Kikkawa, T. ; Huo, D.T.-C.
Pub. info.: Proceedings of the Symposium on Reliability of Metals in Electronics.  pp.232-245,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-3
3.

Conference Proceedings
Conference Proceedings
3. Selective Synthesis of α-Chloroepoxides by Electroreductive Cross-Coupling of Methyl Trichloroacetate with Aliphatic Aldehydes Using Reactive Metal Anode
Nishiguchi, I. ; Goda, S. ; Kikkawa, T. ; Ishino, Y. ; Maekawa, H.
Pub. info.: Reactive intermediates in organic and biological electrochemistry : proceedings of the International Symposium in Honor of the Late Professor Eberhard Steckhan.  pp.13-16,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-14
4.

Conference Proceedings
Conference Proceedings
4. THE INFLUENCE OF HBr DISCHARGE AMBIENCE ON POLY-Si/ SiO2 ETCHING SELECTIVITY
Ikawa, E. ; Tokashiki, K. ; Kikkawa, T. ; Teraoka, Y. ; Nishiyama, I.
Pub. info.: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.255-262,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 223
5.

Conference Proceedings
Conference Proceedings
5. DEVICE APPLICATION AND GROWTH MECHANISM FOR HEMISPHERICAL-GRAINED Si
Watanabe, H. ; Aoto, N. ; Adachi, S. ; Kikkawa, T.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.401-406,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
6.

Conference Proceedings
Conference Proceedings
6. Epitaxial Cobalt Silicide Formation Using High-Temperature Sputtering and Vacuum Annealing
Inoue, K. ; Tung, R. T. ; Mikagi, K. ; Chikaki, S. ; Kikkawa, T.
Pub. info.: Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A..  pp.435-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 440
7.

Conference Proceedings
Conference Proceedings
7. The Nucleation of Crystalline TiSi2 Phases From Amorphous TiSix Layers and Interfacial Layers
Tung, R. T. ; Fujii, K. ; Kikuta, K. ; Chikaki, S. ; Kikkawa, T.
Pub. info.: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.267-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 441
8.

Conference Proceedings
Conference Proceedings
8. A New Approach Of Thin-Film X-Ray Diffraction / Scattering Analysis For Ultra-Low-K Dielectrics With Periodic Pore Structures
Hata, N. ; Oku, Y. ; Yamada, K. ; Kikkawa, T.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.581-586,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
9.

Conference Proceedings
Conference Proceedings
9. Advanced Characterization of Ultra-Low-k Periodic Porous Silica Films: Pore Size Distribution, Pore-Diameter Anisotropy, and Size and Macroscopic Isotropy of Domain Structure
Hata, N. ; Negoro, C. ; Takada, S. ; Yamada, K. ; Oku, Y. ; Kikkawa, T.
Pub. info.: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A..  pp.191-196,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 766
10.

Conference Proceedings
Conference Proceedings
10. Porous Silicon Oxynitride Films Derived From Polysilazane as a Novel Low-Dielectric Constant Material
Aoki, T. ; Kikkawa, T. ; Shimizu, Y.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.41-48,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565