1.

Conference Proceedings
Conference Proceedings
1. Control of a drop ejector used as a photoresist dispenser
Roche,P.-E. ; Hansson,A. ; Khuri-Yakub,B.T.
Pub. info.: Smart structures and materials 1998 : mathematics and control in smart structures : 2-5 March 1998, San Diego, California.  pp.446-454,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3323
2.

Conference Proceedings
Conference Proceedings
2. Ultrasonic cure and temperature monitoring of photoresist during the pre-exposure bake process
Morton,S.L. ; Degertekin,F.L. ; Khuri-Yakub,B.T.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.254-261,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
3.

Conference Proceedings
Conference Proceedings
3. Resist deposition without spinning by using novel ink-jet technology and direct lithography for MEMS
Percin,G. ; Soh,T.H. ; Khuri-Yakub,B.T.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 2  pp.1382-1389,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
4.

Conference Proceedings
Conference Proceedings
4. In-situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques
Khuri-Yakub,B.T. ; Pei,J. ; Degertekin,F.L. ; Saraswat,K.C.
Pub. info.: Nondestructive Evaluation for Process Control in Manufacturing.  pp.131-135,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2948
5.

Conference Proceedings
Conference Proceedings
5. Micromachined capacitive immersion ultrasonic transducers
Khuri-Yakub,B.T. ; Jin,X.C. ; Ladabaum,I. ; Degertekin,F.L.
Pub. info.: Medical Imaging 1998: Ultrasonic Transducer Engineering.  pp.237-241,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3341
6.

Conference Proceedings
Conference Proceedings
6. Erosion/corrosion monitoring with dry-contact ultrasonic Lamb-wave transducers
Pei,J. ; Degertekin,F.L. ; Honein,B.V. ; Khuri-Yakub,B.T.
Pub. info.: Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware.  pp.428-435,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2945
7.

Conference Proceedings
Conference Proceedings
7. Micromachined ultrasonic transducers for air-coupled nondestructive evaluation
Hansen,S.T. ; Degertekin,F.L. ; Khuri-Yakub,B.T.
Pub. info.: Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware III.  pp.310-318,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3586
8.

Conference Proceedings
Conference Proceedings
8. Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs
Percin,G. ; Khuri-Yakub,B.T.
Pub. info.: Micromachined Devices and Components IV.  pp.411-414,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514