1.

Conference Proceedings
Conference Proceedings
1. Transient Enhanced Diffusion of Phosphorus and Defect Evolution in P+ Implanted Si
Li, J. ; Keys, P. ; Chen, J. ; Law, M. E. ; Jones, K. S. ; Jasper, C.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.175-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
2.

Conference Proceedings
Conference Proceedings
2. Modeling of Dopant Defect Interactions
Camarce, C. ; Radic, L. ; Keys, P. ; Brindos, R ; Jones, K.S. ; Law, M.E.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669