Bergh, M. ; Tiensuu, St. ; Keskitalo, N. ; Forsberg, M.
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Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.87-94, 1997. Pennington, NJ. Electrochemical Society
Sveinbjoernsson, E.OE. ; Bengtsson, St. ; Weber, J. ; Keskitalo, N.
Pub. info.:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.264-271, 1997. Pennington, NJ. Electrochemical Society
Keskitalo, N. ; Hallen, A. ; Lalita, J. ; Svensson, B. G.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.233-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Lalita, J. ; Pellegrino, P. ; Hallen, A. ; Svensson, B. G. ; Keskitalo, N. ; Fatima, S. ; Jagadish, C.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.239-, 1997. Pittsburg, Pa.. MRS - Materials Research Society