1.

Conference Proceedings
Conference Proceedings
1. Residual Stress Control to Optimize PZT MEMS Performance
Kennedy, M.S. ; Bahr, D.F. ; Richards, C.D. ; Richards, R.F.
Pub. info.: Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.163-168,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 741
2.

Conference Proceedings
Conference Proceedings
2. Fracture in Thin Oxide Films
Bahr, D.F. ; Olson, A.L. ; Morasch, K.R. ; Kennedy, M.S. ; Marek, D. Rodriguez ; Alamr, A.
Pub. info.: Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.55-62,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 795
3.

Conference Proceedings
Conference Proceedings
3. Optimization of Film Stresses Utilized in Composite Piezoelectric Membrane Microgenerators
Kennedy, M.S. ; Zosel, M. ; Richards, C.D. ; Richards, R.F. ; Bahr, D.F. ; Hipps, K.W. ; Moody, N.R.
Pub. info.: Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.503-508,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 795