1.

Conference Proceedings
Conference Proceedings
1. Contact hole shrink process with novel chemical shrink materials
Kawamura, D. ; Takeishi, T. ; Sho, K. ; Matsunaga, K. ; Shibata, N. ; Ozawa, K. ; Shimura, S. ; Kyoda, H. ; Kawasaki, T. ; Ishida, S. ; Toshima, T. ; Oonishi, Y. ; Ito, S.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.206-213,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. Impregnation of resist with functional molecules using supercritical fluid: a new approach to resist engineering for advanced lithography
Niwa, T. ; Enomoto, M. ; Shimura, S. ; Kyoda, H. ; Kawasaki, T. ; Kitano, J.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.187-194,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings
Conference Proceedings
3. TEM OBSERVATION OF THE DAMAGES IN HEAVILY ION-IMPLANTED FINE Si COLUMNS
Shingubara, S. ; Sukesako, H. ; Kawasaki, T. ; Inoue, K. ; Matusi, Y. ; Sakaue, H. ; Takahagi, T. ; Horiike, Y.
Pub. info.: Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.641-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 354
4.

Conference Proceedings
Conference Proceedings
4. HIGH QUALITY CdTe GROWTH BY GRADIENT FREEZE METHOD
Tanaka, A. ; Masa., Y, ; Seto, S. ; Kawasaki, T.
Pub. info.: Materials for infrared detectors and sources : symposium held December 1-5, 1986, Boston, Massachusetts, U.S.A..  pp.111-118,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 90
5.

Conference Proceedings
Conference Proceedings
5. Biocompatibility of Titanium/Hydroxyapatite and Titanium/Cobalt Functionally Graded Implants
Watari, F. ; Yokoyama, A. ; Matsuno, H. ; Saso, F. ; Uo, M. ; Kawasaki, T.
Pub. info.: Functionally graded materials 1998 : proceedings of the 5th International Symposium on Functionally Graded Materials, held in New Town Hall, Dresden, Germany, October 26-29, 1998.  pp.356-361,  1999.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 308-311
6.

Conference Proceedings
Conference Proceedings
6. Development of Functionally Graded Implant and Dental Post for Bio-Medical Application
Watari, F. ; Kondo, H. ; Matsuo, S. ; Miyao, R. ; Yokoyama, A. ; Omori, M. ; Hirai, T. ; Tamura, Y. ; Uo, M. ; Ohara, N. ; Kawasaki, T.
Pub. info.: Functionally graded materials VII : proceedings of the seventh International Symposium on Functionally Graded Materials (FGM 2002), Beijing, China, October 15-18, 2002.  pp.321-326,  2003.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 423-425
7.

Technical Paper
Technical Paper
7. Electronically-Scanning Millimeter-Wave RADAR for Forward Objects Detection.
Kawakubo, A. ; Tokoro, S. ; Yamada, Y. ; Kuroda, K. ; Kawasaki, T.
Pub. info.: 2004 SAE world congress : technical paper.  2004.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2004
8.

Technical Paper
Technical Paper
8. Solar Array ESD Ground Tests in Simulated GEO Environment
Kim, J. ; Kawasaki, T. ; Shikata, Y. ; Hosoda, S. ; Cho, M.
Pub. info.: AIAA meeting papers on disc.  2005.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 43rd
9.

Conference Proceedings
Conference Proceedings
9. Robust lithography application to prevent resist poisoning in BEOL
Shimura, S. ; Kawasaki, T. ; Iwashita, M.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1425-1432,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039