1.

Conference Proceedings
Conference Proceedings
1. Preparation of high-aspect-ratio 70-nm patterns by supercritical drying technique in proximity x-ray lithography
Kikuchi, Y. ; Fukuda, T. ; Shishiguchi, S. ; Masuda, K. ; Kawakami, N.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.896-902,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
2.

Conference Proceedings
Conference Proceedings
2. Label processing for photonic network with angular-multiplexed spectral hologram
Shimizu, K. ; Kawakami, N. ; Wada, N. ; Chujo, W. ; Kodate, K.
Pub. info.: 19th Congress of the International Commission for Optics: Optics for the Quality of Life.  pp.566-568,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4829
3.

Conference Proceedings
Conference Proceedings
3. Supercritical resist dry technique for electron-beam projection lithography (EPL)
Petricich, G. ; Suzuki, K. ; Munemasa, J. ; Yoshikawa, T. ; Kawakami, N. ; Shimizu, S. ; Watanabe, M.
Pub. info.: Emerging Lithographic Technologies VII.  2  pp.917-924,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037