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Sato, E. ; Tanaka, E. ; Mori, H. ; Kawakami, H. ; Kawai, T. ; Inoue, T. ; Ogawa, A. ; Sato, S. ; Ichimaru, t. ; Takayama, K. ; Ido, H.
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Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA. pp.591811-591811, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Asano, H. ; Suzuki, J. ; Kawakami, H. ; Eguchi, H.
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Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.418-425, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.135-, 1994. Pittsburgh, PA. MRS - Materials Research Society