1.

Conference Proceedings
Conference Proceedings
1. 6H-SiC Homoepitaxial Growth and Optical Property of Boron- and Nitrogen-Doped Donor-Acceptor Pair (DAP) Emission of 1o-Off Substrate by Closed-Space Sublimation Method
Kawai, Y. ; Maeda, T. ; Nakamura, Y. ; Sakurai, Y. ; Iwaya, M. ; Kamiyama, S. ; Amano, H. ; Akasaki, I. ; Yoshimoto, M. ; Furusho, T. ; Kinoshita, H. ; Shiomi, H.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.263-266,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
2.

Conference Proceedings
Conference Proceedings
2. Chemically amplified negative resist optimized for high-resolution x-ray lithography
Nakamura, J. ; Kawai, Y. ; Deguchi, K. ; Oda, M. ; Matsuda, T.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.455-462,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
3.

Conference Proceedings
Conference Proceedings
3. Line-edge roughness characterized by polymer aggregates in photoresists
Yamaguchi, T. ; Namatsu, H. ; Nagase, M. ; Kurihara, K. ; Kawai, Y.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.617-624,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
4.

Conference Proceedings
Conference Proceedings
4. CYCLIC VOLTAMMETRY OF PPB-LEVEL COPPER IN AQUEOUS POTASSIUM HYDROXIDE SOLUTION
Inouc, K. ; Kosaka, S. ; Kawai, Y. ; Tanaka, H. ; Abe, Y. ; Yoneyama, T.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.491-496,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
5.

Conference Proceedings
Conference Proceedings
5. Fully Depleted SIMOX SOI Process Technology for Low Power Digital and RF Device
Itoh, M. ; Kawai, Y. ; Ito, S. ; Yokomizo, K. ; Katakura, Y. ; Fukuda, Y. ; Ichikawa, F.
Pub. info.: Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium.  pp.331-336,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-3
6.

Conference Proceedings
Conference Proceedings
6. Ultra-Low Temperature Growth of High-Integrity Gate Oxide Films by Low-Energy Ion-Assisted Oxidation
Kawai, Y. ; Konishi, N. ; Watanabe, J. ; Ohmi, T.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.568-579,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
7.

Conference Proceedings
Conference Proceedings
7. Eight Inch Uniform ECR Plasmas Using the Circular TEOl Mode Microwave
Hirotsu, N. ; Hidaka, R. ; Yamaguchi, T. ; Tanaka, M. ; Kawai, Y.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.92-99,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
8.

Conference Proceedings
Conference Proceedings
8. Characterization of the direct Bonding of Silicon Wafers after Treatment in Dilute HF Solutions
Okada, C. ; Kawai, Y. ; Morita, E. ; Saitou, Y.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.363-370,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
9.

Technical Paper
Technical Paper
9. Toyota's New Five-Speed Automatic Transaxle U150E for FWD Passenger Cars.
Kawai, Y. ; Tanaka, K. ; Iijima, Y. ; Kimura, H. ; Fukaya, N.
Pub. info.: 2002 SAE world congress : technical paper.  2002.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2002
10.

Conference Proceedings
Conference Proceedings
10. Newly developed alternating-copolymer-based silicon containing resists for sub-100-nm pattern fabrication
Hatakeyama, J. ; Takeda, T. ; Kinsho, T. ; Kawai, Y. ; Ishihara, T.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.672-681,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039