1.

Conference Proceedings

Conference Proceedings
Tavrov,A.V. ; Miyamoto,Y. ; Kawabata,T. ; Takeda,M. ; Andreev,V.V.
Pub. info.: Interferometry '99 : techniques and technologies : 20-23 September 1999, Pułtusk, Poland.  pp.347-357,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3744
2.

Conference Proceedings

Conference Proceedings
Nakamura,T. ; Tsuru,K. ; Kawabata,T.
Pub. info.: Videometrics V : 30-31 July 1997, San Diego, California.  pp.268-273,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3174
3.

Conference Proceedings

Conference Proceedings
Tavrov,A.V. ; Miyamoto,Y. ; Kawabata,T. ; Takeda,M. ; Andreev,V.A.
Pub. info.: Laser interferometry X : techniques and analysis : 31 July-1 August 2000, Sandiego, USA.  Part A  pp.12-20,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4101
4.

Conference Proceedings

Conference Proceedings
Hirumi,J. ; Hayashimoto,T. ; Kawabata,T. ; Hosono,K. ; Hoshino,E. ; Kai,J.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.307-318,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412