Niel, A. ; Deutschl, E. ; Gasser, C. ; Kaufmann, P.
Pub. info.:
Two- and three-dimensional methods for inspection and metrology III : 24-26 October, 2005, Boston, Massachusetts, USA. pp.60000L-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Neli, R. R. ; Doi, I. ; Melo, A. M. ; Arbex, C. J. N. ; Zakia, M. B. P. ; Kaufmann, P. ; Diniz, J. A. ; Swart, J. W.
Pub. info.:
Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.95-100, 2004. Pennington, N.J.. Electrochemical Society
Vilmer, N. ; Raulin, J.P. ; Trottet, G. ; Nitta, N. ; Silva, A.V.R. ; Kaufmann, P. ; Correia, E. ; Magun, A.
Pub. info.:
8th SOHO Workshop, Plasma Dynamics and Diagnostics in the Solar Transition Region and Corona, 22-25 June 1999, CAP 15, 1-13 Quai Grenelle, 75015 Paris, France. pp.681-686, 1999. Noordwijk, the Netherlands. ESA Publications Division
Leistner, T ; Frey, L. ; Bauer, A. ; Schmidt, C. ; Lehmbacher, K. ; Haerler, P. ; Herrmann, W. ; Mesic, E. ; Kaufmann, P. ; Kudinski, L. ; Durst, F.
Pub. info.:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.160-167, 2001. Pennington, N.J.. Electrochemical Society
Lüdi, A. ; Magun, A. ; Murk, A. ; Kämpfer, N. ; Kaufmann, P.
Pub. info.:
AP 2000 : millennium Conference on Antennas & Propagation, Davos, Switzerland, 9-14 April 2000. 2000. Noordwijk, Netherlands. ESA Publications Division