Petzold, M. ; Katzer, D. ; Wiemer, M. ; Bagdahn, J.
Pub. info.:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.613-623, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Bagdahn, J. ; Katzer, D. ; Petzold, M. ; Wiemer, M.
Pub. info.:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.285-290, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.243-250, 1993. Pennington, NJ. Electrochemical Society
Conference Proceedings
