1.

Conference Proceedings
Conference Proceedings
1. Progress on the realization of the electron column modules for SCALPEL high-throughput/alpha electron projection lithography tools
Stenkamp,D. ; Kienzle,O. ; Orchowski,A. ; Rau,W.D. ; Weickenmeier,A. ; Benner,G. ; Wetzke,M. ; Waskiewicz,W.K. ; Katsap,V. ; Zhu,X. ; Liu,H. ; Munro,E. ; Rouse,J.A.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.115-125,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Mesh-equipped Wehnelt source for SCALPEL
Katsap,V. ; Waskiewicz,W.K. ; Rouse,J.A.
Pub. info.: Charged particle optics IV : 22-23 July 1999, Denver, Colorado.  pp.75-81,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3777
3.

Conference Proceedings
Conference Proceedings
3. Scanning thermionic emission imaging of cathode surfaces
Sewell,P.B. ; Katsap,V. ; Waskiewicz,W.K.
Pub. info.: Charged particle optics IV : 22-23 July 1999, Denver, Colorado.  pp.125-132,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3777
4.

Conference Proceedings
Conference Proceedings
4. Modeling of laminar e-beam source for SCALPEL
Waskiewicz,W.K. ; Liddle,J.A. ; Katsap,V.
Pub. info.: Charged particle optics IV : 22-23 July 1999, Denver, Colorado.  pp.60-64,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3777
5.

Conference Proceedings
Conference Proceedings
5. 3D simulation of flat｡ｦcathode electron guns with space charge
Rouse,J.A. ; Zhu,X. ; Munro,E. ; Liu,H. ; Waskiewicz,W.K. ; Katsap,V.
Pub. info.: Charged particle optics IV : 22-23 July 1999, Denver, Colorado.  pp.65-74,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3777
6.

Conference Proceedings
Conference Proceedings
6. Uniform large-area thermionic cathode for SCALPEL
Katsap,V. ; Sewell,P.B. ; Wasklewlcz,W.K. ; Zhu,W.
Pub. info.: Charged particle optics IV : 22-23 July 1999, Denver, Colorado.  pp.2-6,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3777