1.

Conference Proceedings
Conference Proceedings
1. A Study of Highly Selective Oxide Etching by ECR Plasma
Katayama, K. ; Hisada, M. ; Nakamura, S. ; Fujiwara, H.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.201-207,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
2.

Conference Proceedings
Conference Proceedings
2. Laser processing at solid-liquid interfaces using femtosecond pulse laser sources
Katayama, K. ; Yonekubo, H. ; Sawada, T.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.367-369,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
3.

Conference Proceedings
Conference Proceedings
3. Progress in organic write-once technology for Blu-ray disc-recordable and DVD-R media (Invited Paper)
Kubo, H. ; Shibata, M. ; Katayama, K. ; Takano, H. ; Kakuta, T. ; Usami, Y. ; Watanabe, T. ; Nagaoka, K. ; Mikoshiba, H.
Pub. info.: Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA.  pp.128-135,  2004.  Bellingham.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5380
4.

Conference Proceedings
Conference Proceedings
4. Real-Time Spectroscopic Ellipsometry Study of the Thermal Cleaning Process for Silicon Epitaxial Growth by UHV-CVD
Nozawa, K. ; Katayama, K. ; Kanzawa, Y. ; Sugahara, G. ; Saitoh, T. ; Kubo, M.
Pub. info.: In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A..  pp.83-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 569
5.

Conference Proceedings
Conference Proceedings
5. Deposition of crack-free BaTiO3 and Pb(Zr,Ti)O3 films over 1 ｦﾌm thick via single-step dip-coating
Kozuka, H. ; Kajimura, M. ; Katayama, K. ; Isota, Y. ; Hirano, T.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.187-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606
6.

Conference Proceedings
Conference Proceedings
6. Barometric pressure compensation to control photoresist film thickness
Vishnu, V. ; Randall, M. ; Pillette, C.J. ; Katayama, K. ; Omura, K. ; Uemura, R. ; Tomita, H. ; Ando, R. ; Ogata, K. ; Maejima, H. ; DiDonato, A. ; Nicholson, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.958-966,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375