1.

Conference Proceedings
Conference Proceedings
1. Mechanical Stress Characterization of Shallow Trench Isolation by Kelvin Probe Force Microscopy
Rueda, H. ; Slinkman, J. ; Chidambarrao, D. ; Moszkowicz, L. ; Kaszuba, P. ; Law, M.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.245-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
2.

Conference Proceedings
Conference Proceedings
2. Reducing measurement uncertainty drives the use of multiple technologies for supporting metrology
Banke, B. ; Archie, C.N. ; Sendelbach, M. ; Robert, J. ; Slinkman, J.A. ; Kaszuba, P. ; Kontra, R. ; DeVries, M. ; Solecky, E.P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.133-150,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375