1.

Conference Proceedings
Conference Proceedings
1. Design issues in SOI-based high-sensitivity piezoresistive cantilever devices
Kassegne, S. ; Madou, M.J. ; Whitten, R. ; Zoval, J.V. ; Mather, E. ; Sarkar, K. ; Hodko, D. ; Maity, S.
Pub. info.: Smart structures and materials 2002 : modeling, signal processing, and control : 18-21 March 2002, San Diego, USA.  pp.588-597,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4693
2.

Conference Proceedings
Conference Proceedings
2. Carbon-MEMS architectures for 3D microbatteries
Wang, C. ; Taherabadi, L. ; Jia, G. ; Kassegne, S. ; Zoval, J. V. ; Madou, M. J.
Pub. info.: MEMS, MOEMS, and Micromachining.  pp.295-302,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5455