1.

Conference Proceedings
Conference Proceedings
1. Cleaning of SCALPEL next-generation Lithography masks using PLASMAX,a revolutionary dry cleaning technology
Festa,J.J. ; Novembre,A.E. ; Bennett,D.A. ; Kasica,R.J. ; Bailey,B. ; Blakey,M.I.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.916-926,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings
Conference Proceedings
2. Techniques to inspect SCALPEL masks
Taylor,D. ; Howard,W.B. ; Kasica,R.J. ; Farrow,R.C. ; Novembre,A.E. ; Caminos,C. ; Knurek,C.S.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.858-864,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings
Conference Proceedings
3. Defect inspection and linewidth measurement of SCALPEL thin membrane masks using optical transmission
Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Mkrtchyan,M.M. ; Novembre,A.E. ; Peabody,M.L. ; Saunders,T.E. ; Windt,D.L. ; Zurbrick,L.S. ; Wiley,J.N. ; Aquino,C. ; Hentschel,S.L. ; Davis,L.C. ; Boyer,B.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.221-231,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
4.

Conference Proceedings
Conference Proceedings
4. 200-mm SCALPEL mask development
Bogart,G.R. ; Novembre,A.E. ; Kornblit,A. ; Peabody,M.L. ; Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Saunders,T.E. ; Knurek,C.S. ; Johnston,I.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.171-177,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
5.

Conference Proceedings
Conference Proceedings
5. Production of SCALPEL masks in a commercial mask facility
Newport,C.L. ; Parker,J. ; Smith,K.M. ; Benveniste,A. ; Kim,N.-W. ; Reyland,D. ; Farrow,R.C. ; Novembre,A.E. ; Kasica,R.J. ; Knurek,C.S. ; Peabody,M.L. ; Rutberg,L.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.162-170,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
6.

Conference Proceedings
Conference Proceedings
6. Overview of SCALPEL mask technology
Bogart,G.R. ; Novembre,A.E. ; Kornblit,A. ; Peabody,M.L. ; Farrow,R.C. ; Blakey,M.I. ; Kasica,R.J. ; Liddle,J.A. ; Saunders,T.E. ; Knurek,C.S.
Pub. info.: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany.  pp.18-19,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3665
7.

Conference Proceedings
Conference Proceedings
7. SCALPEL proof-of-concept system:preliminary lithography results
Waskiewicz,W.K. ; Biddick,C.J. ; Blakey,M.I. ; Brady,K.J. ; Camarda,R.M. ; Connelly,W.F. ; Crorken,A.H. ; Custy,J.P. ; DeMarco,R. ; Farrow,R.C. ; Felker,J.A. ; Fetter,L.A. ; Freeman,R.R. ; Harriott,L.R. ; Huggins,H.A. ; Kasica,R.J. ; Knurek,C.S. ; Kraus,J.S. ; Liddle,J.A.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.255-263,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
8.

Conference Proceedings
Conference Proceedings
8. Fabrication and commercialization of scalpel masks (Invited Paper)
Novenber,A.E. ; Peabody,M.L. ; Blakey,M.I. ; Farrow,R.C. ; Kasica,R.J. ; Liddle,J.A. ; Saunders,T.E. ; Tennant,D.M.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.350-357,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412
9.

Conference Proceedings
Conference Proceedings
9. Yield,metrology,and inspection characteristics of SCALPEL masks
Peabody,M.L. ; Blakey,M.I. ; Farrow,R.C. ; Kasica,R.J. ; Liddle,J.A. ; Novembre,A.E. ; Saunders,T.E. ; Tennant,D.M. ; Windt,D.L.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.190-194,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236