Okoshi, M. ; Kashiura, H. ; Miyokawa, T. ; Toyoda, K. ; Murahara, M.
Pub. info.:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.737-742, 1993. Pittsburgh, Pa.. Materials Research Society
Okoshi, M. ; Miyokawa, T. ; Kashiura, H. ; Murahara, M.
Pub. info.:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.365-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.391-, 1994. Pittsburgh, PA. MRS - Materials Research Society