1.

Conference Proceedings
Conference Proceedings
1. Industry survey of automatic defect classification technologies, methods, and performance
Tobin, K.W., Jr. ; Lakhani, F. ; Karnowski, T.P.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.46-53,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Detection of semiconductor defects using a novel fractal encoding algorithm
Gleason, S.S. ; Ferrell, R.K. ; Karnowski, T.P. ; Tobin, K.W., Jr.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.61-71,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
3.

Conference Proceedings
Conference Proceedings
3. Estimating cross-section semiconductor structure by comparing top-down SEM images
Price, J.R. ; Bingham, P.R. ; Tobin, K.W. Jr., ; Karnowski, T.P.
Pub. info.: Machine vision applications in industrial inspection XI :proceedings of electronic imaging science and technology 2003 : 22-24 January 2003, Santa Clara, California, USA.  pp.161-170,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5011
4.

Conference Proceedings
Conference Proceedings
4. An Integrated Spatial Signature Analysis and Automatic Defect Classification System
Gleason, S.S. ; Tobin, K.W. ; Karnowski, T.P.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.204-211,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12
5.

Conference Proceedings
Conference Proceedings
5. Using an image retrieval system for image data management
Karnowski, T.P. ; Tobin, K.W., Jr. ; Ferrell, R.K. ; Jatko, W.B. ; Lakhani, F.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.120-127,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
6.

Conference Proceedings
Conference Proceedings
6. Sidewall structure estimation from CD-SEM for lithographic process control
Bingham, P.R. ; Price, J.R. ; Tobin, K.W., Jr. ; Karnowski, T.P. ; Bennett, M.H. ; Bogardus, E.H. ; Bishop, M.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.115-126,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041
7.

Conference Proceedings
Conference Proceedings
7. Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval
Price, J.R. ; Bingham, P.R. ; Tobin, K.W., Jr. ; Karnowski, T.P.
Pub. info.: Sixth International Conference on Quality Control by Artificial Vision.  pp.209-219,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5132
8.

Technical Paper
Technical Paper
8. Fuzzy Logic Connectivity in Semiconductor Defect Clustering
Karnowski, T.P. ; Gleason, S.S. ; Tobin, K.W., Jr.
Pub. info.: SME technical paper.  2001.  Society of Manufacturing Engineers