1.

Conference Proceedings
Conference Proceedings
1. Concurrent in-Line inspection system for CO2 laser drilling machine
Kato,M. ; Araki,N. ; Isaji,M.K. ; Karasaki,H.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California.  pp.269-275,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3618
2.

Conference Proceedings
Conference Proceedings
2. Development of the enhanced concurrent in-line inspection system for CO2 laser drilling machine
Nagatoshi,H. ; Isaji,K. ; Sugiyama,T. ; Karasaki,H. ; Kato,M.
Pub. info.: First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan.  pp.212-215,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4088
3.

Conference Proceedings
Conference Proceedings
3. Development of a high-performance UV-DPSS laser drilling system for PWB
Yokohagi,D. ; Mizutani,Y. ; Ichihashi,K. ; Narita,D. ; Kawazoe,K. ; Nagatoshi,H. ; Ukita,K. ; Karasaki,H.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.464-467,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426