Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.328-335, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia. pp.304-310, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India. pp.233-238, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.148-155, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India. pp.280-286, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.280-287, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering