1.

Conference Proceedings
Conference Proceedings
1. Lithography of 180-nm design rule for 1-Gb DRAM
Nam,D. ; Lee,J. ; Kim,C. ; Choi,S. ; Kang,H. ; Moon,J.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.117-123,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Spatial frequency filtering in the pellicle plane
Smith,B.W. ; Kang,H.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.252-265,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
3.

Conference Proceedings
Conference Proceedings
3. NA optimization of 360-nm and 300-nm pitch devices
Kim,H. ; Kim,S. ; Kim,C. ; Hong,J. ; Lee,J. ; Kang,H. ; Moon,J.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.673-677,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
4.

Conference Proceedings
Conference Proceedings
4. Evaluation of metal texture effect on paint appearance
Kang,H. ; Butler,C. ; Yang,Q.
Pub. info.: Three-dimensional imaging, optical metrology, and inspection V : 19-20 September 1999, Boston, Massachusetts.  pp.202-209,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3835
5.

Conference Proceedings
Conference Proceedings
5. Fabrication of small contact using practical pupil filtering
Kang,H. ; Smith,B.W.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1086-1091,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
6.

Conference Proceedings
Conference Proceedings
6. Optical lithography at a 126-nm wavelength
Kang,H. ; Bourov,A. ; Smith,B.W.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.797-801,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
7.

Conference Proceedings
Conference Proceedings
7. Measuring flare and its effect on process latitude
Park,J. ; Kang,H. ; Moon,J. ; Lee,M.
Pub. info.: Optical Microlithography X.  pp.708-713,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
8.

Conference Proceedings
Conference Proceedings
8. Characteristics of Ge-based ARL for DUV lithography
Kim,Y.B. ; Kim,D.W. ; Kang,H. ; Moon,J.T. ; Lee,M.Y.
Pub. info.: Optical Microlithography X.  pp.154-163,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051