1.

Conference Proceedings
Conference Proceedings
1. Development of customer assistance software for alignment parameter optimization
Kanaya, Y. ; Nakajima, S.
Pub. info.: Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA.  pp.237-246,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5378
2.

Conference Proceedings
Conference Proceedings
2. Outlier rejection with mixture models in alignment
Nakajima, S. ; Kanaya, Y. ; Li, M. ; Sugihara, T. ; Sukegawa, A. ; Magome, N.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1729-1741,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. Innovative optical alignment technique for CMP wafers
Sugaya, A. ; Kanaya, Y. ; Nakajima, S. ; Nagayama, T. ; Shiraishi, N.
Pub. info.: Optical Microlithography XV.  Part Two  pp.959-970,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. New method to reduce alignment error by optical system
Nagayama, T. ; Nakajima, S. ; Sugaya, A. ; Kanaya, Y. ; Sukegawa, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.849-860,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
5.

Conference Proceedings
Conference Proceedings
5. Advanced alignment optical system for DUV scanner
Nagayama, T. ; Yasuda, M. ; Kanaya, Y. ; Masada, T. ; Sugaya, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.949-957,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375