1.

Conference Proceedings
Conference Proceedings
1. CONTRIBUTION OF GAS PHASE REACTION TO CVD PROCESSES
Desu, S.B. ; Kalidindi, Surya R.
Pub. info.: Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.307-312,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 131
2.

Conference Proceedings
Conference Proceedings
2. BOND GRAPHS FOR CVD PROCESSES
Kalidindi, Surya R. ; Desu, Seshu B.
Pub. info.: Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.37-42,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 168