Kajiyama, H. ; Kondoh, M. ; Inazumi, C. ; Maezawa, S. ; Oguro, K. ; Takenaka, H.
Pub. info.:
Proceedings of the Symposium on Energy and Electrochemical Processing for a Cleaner Environment. pp.229-244, 1997. Pennington, NJ. Electrochemical Society
Kimura, K. ; Kajiyama, H. ; Miwa, S. ; Yasuda, T. ; Kuo, L. H. ; Jin, C. G. ; Tanaka, K. ; Yao, T.
Pub. info.:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.51-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society