Kado, Y. ; Matsuya, Y. ; Douseki, T. ; Nakata, S. ; Harada, M. ; Yarnada, J.
Pub. info.:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.277-288, 2001. Pennington, N.J.. Electrochemical Society
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.401-412, 1994. Pennington, NJ. Electrochemical Society