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Conference Proceedings

1. Evaluation of the 3D compositional heterogeneity effect on line-edge-roughness

S. Kang ; W. Wu ; V. M. Prabhu ; B. D. Vogt ; E. K. Lin ; K. Turnquest

Pub. info.:	Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6519

Conference Proceedings

2. Direct measurement of the in-situ developed latent image: the residual swelling fraction

V. M. Prabhu ; B. D. Vogt ; S. Kang ; A. Rao ; E. K. Lin ; S. K. Satija ; K. Turnquest

Pub. info.:	Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6519

Conference Proceedings

3. FTIR measurements of compositional heterogeneities

S. Kang ; B. D. Vogt ; W. Wu ; V. M. Prabhu ; D. L. VanderHart ; A. Rao ; E. K. Lin ; K. Turnquest

Pub. info.:	Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6519