1.

Conference Proceedings
Conference Proceedings
1. Tunable infrared detector with integrated micromachined Fabry-Perot filter
N. Neumann ; M. Ebermann ; K. Hiller ; S. Kurth
Pub. info.: MOEMS and miniaturized systems VI : 24-25 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6466
2.

Conference Proceedings
Conference Proceedings
2. Reliability of MEMS devices in shock and vibration overload situations
S. Kurth ; A. Shaporin ; K. Hiller ; C. Kaufmann ; T. Gessner
Pub. info.: Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA.  pp.688409-1-688409-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6884