1.

Conference Proceedings
Conference Proceedings
1. Ultra Shallow Junctions Optimization With Non-Doping Species Co-Implantation
Nathalie Cagnat ; Cyrille Laviron ; Daniel Mathiot ; Blandine Duriez ; Julien Singer ; Romain Gwoziecki ; Frederic Salvetti ; Benjamin Dumont ; Arnaud Pouydebasque
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.15-20,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
2.

Conference Proceedings
Conference Proceedings
2. Atomistic Simulation and Subsequent Optimization of Boron USJ Using Pre-Amorphization and High Ramp Rates Annealing
Julien Singer ; François Wacquant ; Davy Villanueva ; Frédéric Salvetti ; Cyrille Laviron ; Olga Cueto ; Pierrette Rivallin ; Martín Jaraíz ; Alain Poncet
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.229-236,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070