Dean, R. ; Malhotra, V.K. ; King, N. ; Sanie, M. ; MacDonald, S.S. ; Jordan, J.D. ; Hirukawa, S.
Pub. info.:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.197-204, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Karklin, L.N. ; Oren, M. ; Dudau, D. ; Jordan, J.D.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology X. pp.689-697, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering