Griglione, Michelle ; Anderson, Tim ; Haddara, Yaser ; Law, Mark ; Jones, Kevin
Pub. info.:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.119-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Earles, Susan ; Law, Mark E. ; Jones, Kevin ; Talwar, Somit ; Corcoran, Sean
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Adam, Lahir Shaik ; Robertson, Lance ; Law, Mark E. ; Jones, Kevin ; Gable, Kevin ; Hegde, Suri ; Dokumaci, Omer
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society