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11 results

Conference Proceedings

1. CHEMICAL OXIDE CHARACTERIZATION

Paillet, C. ; Joly, J.P. ; Tardif, F. ; Barla, K. ; Patruno, P. ; Levy, D.

Pub. info.:	Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.366-370, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-20

Conference Proceedings

2. PHYSICOCHEMICAL PROPERTIES OF RF MAGNETRON SPUTTERED LEADL ZIRCONATE TITANATE THIN FILMS

Cattan, E. ; Agius, B. ; Achard, H. ; Joly, J.P. ; Cheang Wong, J.C. ; Ortega, C. ; Siejka, J.

Pub. info.:	Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.. pp.173-178, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	243

Conference Proceedings

3. Characterization of copper and nickel contamination using recombination lifetime techniques

Walz, D. ; Joly, J.P. ; Suarez, M. ; Palleau, J. ; Kamarinos, G.

Pub. info.:	ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.64-72, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-30

Conference Proceedings

4. Comparative study of on-line lifetime techniques for the monitoring of metallic micro contamination for ULSI microelectronics

Walz, D. ; Joly, J.P. ; Kamarinos, G. ; Barla, K.

Pub. info.:	ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.35-43, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-30

Conference Proceedings

5. New SiC on insulator wafers based on the Smart-Cut approach and their potential applications

Joly, J.P. ; Aspar, B. ; Bruel, M. ; Di Cioccio, L. ; Letertre, F. ; Hugonnard-Bruyere, E.

Pub. info.:	Progress in SOI structures and devices operating at extreme conditions. pp.31-38, 2002. Dordrecht. Kluwer Academic Publishers
Title of ser.:	NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:	58

Conference Proceedings

6. IMPACT STUDY OF THE USE OF ULSI, VLSI AND MOS GRADE CHEMICALS IN THE RCA CLEANING PROCESS ON MOS AND BIPOLAR DEVICES

Tardif, F. ; Joly, J.P. ; Lardin, T. ; Tonti, A. ; Patruno, P. ; Levy, D. ; Sievert, W.

Pub. info.:	Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.114-122, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-15

Conference Proceedings

7. IMPACT STUDY OF THE USE OF ULSI, VLSI AND MOS GRADE CHEMICALS IN THE RCA CLEANING PROCESS ON MOS AND BIPOLAR DEVICES

Tardif, F. ; Joly, J.P. ; Lardin, T. ; Tonti, A. ; Patruno, P. ; Levy, D. ; Sievert, W.

Pub. info.:	Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.85-93, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-7

Conference Proceedings

8. P-glass reflow with a tunable CO2 laser

Jeuch, P. ; Joly, J.P. ; Hode, J.M.

Pub. info.:	Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.603-608, 1982. New York. North Holland
Title of ser.:	Materials Research Society symposia proceedings
Ser. no.:	4

Conference Proceedings

9. OPTIMIZATION OF HF AND OXIDANT WET CLEANINGS BEFORE 7nm GATE OXIDE

Tardif, F. ; Lardin, T. ; Paillet, C. ; Joly, J.P. ; Fleury, A. ; Patruno, P. ; Levy, D. ; Barla, K.

Pub. info.:	Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.49-59, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-20

10.

Conference Proceedings

10. Monitoring of metallic contamination by direct and indirect analytical methods: application to cleaning processes in IC manufacturing

Tardif, F. ; Joly, J.P. ; Walz, D.

Pub. info.:	ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.299-315, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-30

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Author: Joly, J.P.